Device for inspecting mask plate, method for inspecting mask plate, and corresponding method for controlling light sources
US10986283B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 13, 2018 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Aug 13, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30121
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The embodiments of the present disclosure propose a device for inspecting a mask plate, a method for inspecting a mask plate, and a corresponding method for controlling light sources. The device includes: an image sensor configured to capture an image of the mask plate; and a plurality of light sources disposed on one side of the mask plate opposite to the image sensor, wherein at least one of the plurality of light sources is configure to emit light when the image sensor is capturing an image of a first region of the mask plate, and the at least one light source comprises light sources within a first range, wherein the first range corresponds to the first region and an orthographic projection of the image sensor on a light source plane falls within the first range. The method for controlling light sources includes: turning on at least one of a plurality of light sources disposed on one side of the mask plate opposite to an image sensor, which corresponds to a first region of the mask plate to be inspected, when the image sensor is moved to a position corresponding to the first region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.