Method and apparatus for fabricating a stretchable electronic element
US10986727B2 · kind B2 · utility
1Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2018 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Apr 4, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K1/0283
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
According to an exemplary embodiment of the present invention, by providing an apparatus for fabricating a stretchable electronic element including a chamber, a plurality of sample portions loaded into the chamber and spaced apart from each other, while the chamber is maintained at atmospheric pressure, and a movable member moving the plurality of sample portions and compressing each of the plurality of sample portions together while the chamber is kept under vacuum, it is possible to fabricate variable stretchable electronic elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.