Board inspecting apparatus and board inspecting method using the same
US10986761B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2017 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | May 24, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95638
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The board inspecting apparatus include a measuring section obtaining measurement data for at least a portion of a board, a processing section comparing the measurement data and pre-obtained reference data, based on feature objects set on the board, to perform warpage compensation and inspecting the board with warpage compensated, a display section displaying ranges adjusting a first level of an inspection speed and a second level of a precision of the warpage compensation, and an input section receiving, from a user, inputs for the first and second levels as a specific setting combination having a trade-off relationship. The processing section, when the inspection speed and the precision are established, designates a specific option corresponding to the inspection speed and the precision among options increasing the precision so that the specific option is applied. Thus, users' convenience may be improved, and users may easily set options for distortion compensation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.