Crystal oscillation probe structure and evaporation device
US10988840B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 1, 2019 |
| Grant date | Apr 27, 2021 |
| Priority date | — |
| Expiry date | Aug 8, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02854
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A crystal oscillation probe structure and an evaporation device are provided. The crystal oscillation probe structure includes a guide cover, a crystal oscillation probe and a mesh screen structure, the guide cover includes a chamber with a guide opening, the crystal oscillation probe is fixed in the chamber, the crystal oscillation probe includes at least one crystal oscillation sheet, the mesh screen structure includes a plurality of openings, and the mesh screen structure is located on a traveling path of a material traveling toward the at least one crystal oscillation sheet and disposed on a side of the at least one crystal oscillation sheet facing the guide opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.