Vibration sensing system with wavelength encoding
US10989517B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2017 |
| Grant date | Apr 27, 2021 |
| Priority date | — |
| Expiry date | Nov 21, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for use in inspection of a sample is described, the system comprises: an illumination unit configured to provide coherent illumination comprising a plurality of at least two wavelengths and direct said coherent illumination onto an inspection region of a sample; and a collection unit comprising at least one detector array and configured for collecting light returning from said inspection region and generate data indicative of speckle patterns in said plurality of at least two wavelengths at a predetermined sampling rate, wherein said illumination unit is configured for directing light components of said at least two wavelengths toward corresponding two or more segments of said inspection region, and wherein said data indicative of speckle patterns corresponding with said two or more segments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.