Recessed carbon nanotube article and method for making same

US10989602B2 · kind B2 · utility

Assignee

• Government of the United States of America, as represented by the Secretary of Commerce · US

Inventors

• Christopher Yung · Louisville, US
• Nathan Andrew Tomlin · Boulder, US
• Daniel R. Schmidt · Ingelfingen, DE

Key dates

• Filing date: Jun 27, 2019
• Grant date: Apr 27, 2021
• Expiry date: Nov 1, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2005/202
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A recessed carbon nanotube article includes a base; a substrate disposed on the base; wells disposed in the substrate and bounded by the base and a substrate wall; and a carbon nanotube element disposed in individual wells and including vertically aligned carbon nanotubes such that a longitudinal length of the vertically aligned carbon nanotubes is less than a depth of the well in which the carbon nanotube element is disposed. A recessed carbon nanotube bolometer includes a base; a substrate on the base; radiation wells in the substrate; carbon nanotubes in the wells; thermistors and heaters on the membrane arranged as an electrical substitution member. A process for making a recessed carbon nanotube bolometer includes forming a substrate on a base; forming a radiation well in the substrate; forming carbon nanotubes in the well; disposing a cover on the wells; and forming a thermistor and a heater on the base.