Cantilever-free scanning probe microscopy
US10989736B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2020 |
| Grant date | Apr 27, 2021 |
| Priority date | — |
| Expiry date | Oct 27, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a probe assembly, a camera, and a control system. The probe assembly includes a rigid substrate, a compliant layer provided on the rigid substrate, one or more rigid probes can be arranged on the compliant layer to cover at least a portion of the compliant layer, and a reflective layer can cover the one or more rigid probes and uncovered portions of the compliant layer. The camera is configured to generate image data from the probe assembly. The control system is configured to receive image data from the camera and develop a topographical image of a surface of a sample, based at least in part on the received image data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.