Micromechanical component and method for producing a micromechanical component

US10989913B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Andreas Finn · Dresden, DE
• Frederic Njikam Njimonzie · Reutlingen, DE
• Helmut Grutzeck · Tübingen, DE
• Joerg Muchow · Reutlingen, DE
• Rainer Straub · Entringen, DE

Key dates

• Filing date: Sep 25, 2017
• Grant date: Apr 27, 2021
• Expiry date: May 26, 2038

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0307
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component having a mounting support, at least one coil winding held by at least one coil brace and comprising conductor tracks made from at least one electrically conductive material, at least one first subsection of the at least one coil winding being anchored on the associated coil brace, and an adjustable part, the at least one coil brace and the adjustable part being connected to each other and via at least one spring element to the mounting support in such a way that the adjustable part is adjustable about at least one axis of rotation in relation to the mounting support, and, while the at least one first subsection of the at least one coil winding is anchored on the associated coil brace, at least one second subsection of the same coil winding spans at least one gap formed in the associated coil brace as a cantilever subsection.