Patent · US Active

Silsesquioxane resin and oxaamine composition

US10990012B2 · kind B2 · utility

1Cited by

23References

14Claims

0Family size

Assignee

Dow Silicones Corporation · US

Inventors

Peng-Fei Fu · Midland, US
Wonbum Jang · Jincheon-eup, KR

Key dates

Filing date	Apr 27, 2017
Grant date	Apr 27, 2021
Priority date	—
Expiry date	Nov 5, 2037

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC08G77/70
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A silsesquioxane-containing composition comprising a silsesquioxane resin and an oxaamine of formula (II) (see description), products prepared therefrom, photoresist compositions comprising the silsesquioxane-containing composition and a photoacid generator, products prepared therefrom, methods of making and using same, and manufactured articles and semiconductor devices containing same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.