Inline spectroscopy for monitoring chemical vapor deposition processes
US10994990B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2019 |
| Grant date | May 4, 2021 |
| Priority date | — |
| Expiry date | Dec 13, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8416
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for making nanomaterials includes introducing into a catalyzed reactor vessel: a carrier gas at a first carrier gas feed rate; at least one carbon-based reactant at a first reactant feed rate; and optionally, at least one additive at a first additive feed rate. The reactor vessel is heated to a first temperature of at least 150° C., so that a portion of the carbon-based reactant within the reactor vessel reacts to form a plurality of nanomaterials. An exhaust gas is removed from the reactor and periodically sampled by exposing a paper web to the gas so that a sample of the nanomaterials from the gas are deposited on a region of the paper web for analysis. Based on this analysis, at least one reaction parameter selected from the group consisting of the first carrier gas feed rate, the first reactant feed rate, and first temperature may be adjusted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.