Stocking system
US11001442B2 · kind B2 · utility
1Cited by
31References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 2020 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Jun 4, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A stocking system is provided. The stocking system includes a wafer carrier, a stocking unit, a plurality of pod stoppers and at least one positioning pin. The stocking unit is configured to store the wafer carrier, and includes a carrying plate for carrying the wafer carrier. The pod stoppers stand on an edge of the carrying plate. The at least one positioning pin is disposed on a front portion of the carrying plate, such that the wafer carrier leans against the at least one positioning pin and is tilted toward a back portion of the carrying plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.