Hard X-ray photoelectron spectroscopy arrangement and system
US11002694B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2019 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Sep 30, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2522
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray source providing a beam of photons which is directed through the system so as to excite electrons from an illuminated sample. An X-ray tube is connected to a monochromator vacuum chamber in which a crystal is configured to monochromatize and focus the beam onto an illuminated sample. A hemispherical electron energy analyser is mounted onto the analysis chamber. An air gap is provided between the X-ray tube and the monochromator chamber, which air gap is provided with a first radiation trap to shield the ambient air from the radiation when the air gap is illuminated with X-rays from the source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.