Chip-scale LIDAR with a single 2D MEMS scanner
US11002832B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2018 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Aug 12, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54486
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A LIDAR system, LIDAR chip and method of manufacturing a LIDAR chip. The LIDAR system includes a photonic chip configured to transmit a transmitted light beam and to receive a reflected light beam, a scanner for directing the transmitted light beam towards a direction in space and receiving the reflected light beam from the selected direction, and a fiber-based optical coupler. The photonic chip and the scanner are placed on a semiconductor integrated platform (SIP). The fiber-based optical coupler is placed on top of the photonic chip to optically couple to the photonic chip for directing the a transmitted light beam from the photonic chip to the scanner and for directing a reflected light beam from the scanner to the photonic chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.