Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication
US11005025B1 · kind B1 · utility
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3References
26Claims
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Key dates
| Filing date | Jun 16, 2017 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Mar 12, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.