System for transferring substrate
US11008181B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2019 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | May 30, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K13/089
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A system for transferring a substrate may adjust a suction force to a suitable level. The system may include a work table, a picker, and a pressure measuring unit. The work table may include a work area for supporting the substrate. The picker may be disposed above the work table and may include a suction unit for providing the suction force. The pressure measuring unit may overlap the suction unit and may include a pressure-sensitive element for facilitating adjustment of the suction force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.