Mass-spectrometric leak detector with turbomolecular pump and booster pump on a common shaft

US11009030B2 · kind B2 · utility

Assignee

• INFICON AG · LI

Inventors

• Werner Grosse Bley · Bonn, DE
• Thomas Böhm · Zorneding, DE
• Hjalmar Bruhns · Bonn, DE

Key dates

• Filing date: Jun 13, 2017
• Grant date: May 18, 2021
• Expiry date: Jan 12, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/205
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

Disclosed is a mass-spectrometry leak detector including a multi-stage turbomolecular pump, a mass spectrometer connected to the suction side of the turbomolecular pump, a preliminary vacuum pump connected to the pressure side of the turbomolecular pump, and a booster pump stage. The suction side of the booster pump stage has a connection for a test object and the pressure side is connected to the pressure side of the turbomolecular pump and to the suction side of the preliminary vacuum pump by means of a gas line path. The stages of the turbomolecular pump and the booster pump stage are arranged on a common shaft and have a common drive and the gas line path is interrupted, by means of a separation, between the pressure side of the booster pump stage and the suction side of the pump stage of the turbomolecular pump connected to the mass spectrometer.