Superconducting nanowire single photon detector and method of fabrication thereof

US11009387B2 · kind B2 · utility

Assignee

• PsiQuantum Corp. · US

Inventors

• Chia-Jung Chung · Sunnyvale, US
• Faraz Najafi · Palo Alto, US
• George Kovall · Campbell, US
• Vitor R. Manfrinato · San Jose, US
• Vimal Kamineni · Mechanicville, US
• Mark Thompson · Palo Alto, US
• Syrus Ziai · Palo Alto, US

Key dates

• Filing date: Apr 15, 2020
• Grant date: May 18, 2021
• Expiry date: Apr 15, 2040

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E40/60
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A superconductor device according to some embodiments comprises a superconductor stack, which includes a superconductor layer and a silicon cap layer over the superconductor layer, the cap layer including amorphous silicon. The superconductor device further comprises a metal contact over a portion of the silicon cap layer and electrically-coupled to the superconductor layer. The metal contact comprises a core including a first metal, and an outer layer around the core that includes a second metal. The portion of the silicon cap layer is converted from silicon to a conductive compound including the second metal to provide low-resistance electrical coupling between the superconductor layer and the metal contact. The superconductor device further comprises a waveguide, and the first portion of the cap layer under the metal contact is at a sufficient lateral distance from the waveguide to prevent optical coupling between the metal contact and the waveguide.