Object processing state sensing using RF radiation
US11009468B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2018 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | Feb 4, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B40/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and method for applying RF energy to determine a processing state of an object placed in a cavity, during processing of the object. The method includes applying RF energy to the object during the processing via at least one radiating element, receiving RF feedback from in or around the cavity, said RF feedback being indicative of a dielectric response of the cavity and/or the object to electromagnetic (EM) fields excited in the cavity, mathematically manipulating the RF feedback to obtain computed RF feedback, determining one or more processing states of the object based on a correlation between the computed RF feedback and the one or more processing states of the object, and monitoring the computed RF feedback during the applying to monitor the one or more processing states of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.