Optical structure with ridges arranged at the same and method for producing the same

US11009673B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Frank Wippermann · Meiningen, DE
• Andreas Reimann · Apolda, DE
• Nicolas Lange · Feldafing, DE
• Andreas Braeuer · Schlieben, DE

Key dates

• Filing date: Aug 22, 2019
• Grant date: May 18, 2021
• Expiry date: Aug 22, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0841
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An apparatus having an optical structure, ridges and an electrostatic actuator with a cantilever electrode is described, wherein the ridges connect the optical structure to a supporting structure and the electrostatic drive is implemented to deflect the optical structure.