Variable power capacitor for RF power applications
US11011350B2 · kind B2 · utility
1Cited by
4References
18Claims
0Family size
Inventors
Key dates
| Filing date | Sep 4, 2014 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | Dec 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/40
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias voltage applied across the dielectric (17) at DC bias electrodes (10, 26, 28). Composite capacitor configurations, an RF power system and a method of controlling the power capacitor are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.