Transport system of semiconductor fabrication facility, associated movable container and method
US11011402B2 · kind B2 · utility
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20Claims
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Assignee
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Key dates
| Filing date | Apr 22, 2019 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | Aug 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67733
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transport system of a semiconductor fabrication facility, including: a rail for carrying vehicle, a sensor installed on the rail, a controller and a power panel. The sensor is arranged to determine a zone and send a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to adjust a current in accordance with the output signal, wherein the current is output to a cable extending along the rail.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.