Patent · US Active

Edge-based camera for characterizing semiconductor layout designs

US11017147B2 · kind B2 · utility

2Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 30, 2019
Grant dateMay 25, 2021
Priority date
Expiry dateAug 30, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06F30/392
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

System and methods for an edge-based camera are disclosed. Semiconductor layout designs are a representation of an integrated circuit that are used to manufacture the integrated circuit. Parts of the layout design, such as points of Interest (POIs), may be subject to analysis with regard to a downstream application, such as hotspot detection. Unlike pixel-based characterizations, POIs are characterized using topological features indicative of quantized values and dimensional features indicative of analog values. For example, an edge may be characterized using a set of relations, which characterizes corners and polygons (including the polygon on which the POI resides and external polygons). In turn, the set of relations may be used to define image representations, including images in different directions relative to the POI (including cardinal and ordinal image). In this way, the topological/dimensional characterization of the POI may be used to analyze the POI in the layout design.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.