Patent · US Active

Display substrate and manufacturing method thereof, display apparatus

US11018166B2 · kind B2 · utility

0Cited by
3References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 16, 2016
Grant dateMay 25, 2021
Priority date
Expiry dateFeb 16, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/60

Abstract

The present disclosure provides a display substrate and a manufacturing method thereof, and a display apparatus, the manufacturing method comprises: forming a base; forming a thin film transistor on the base, the thin film transistor comprises a gate, a source, a drain and an active layer, a first insulating layer is formed on the base, and a second insulating layer is formed between the gate and the active layer, the active layer is formed in the first insulating layer; forming a third insulating layer above the thin film transistor; forming a pixel electrode above the third insulating layer; forming a fourth insulating layer above the pixel electrode, a material of at least one of the base, the first insulating layer, the second insulating layer, the third insulating layer and the fourth insulating layer includes an organic material, and a material of at least one of them includes an inorganic material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.