Photonic wafer level testing systems, devices, and methods of operation

US11022522B2 · kind B2 · utility

Assignee

• STMicroelectronics SA

Inventors

• Marco Piazza · Milano, IT
• Antonio Canciamilla · Busto Arsizio, IT
• Piero Orlandi · Fabriano, IT
• Luca Maggi · Garlate, IT

Key dates

• Filing date: Jul 27, 2018
• Grant date: Jun 1, 2021
• Expiry date: Feb 25, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/2932
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A photonic testing device includes a substrate, an optical device under test (DUT) disposed over the substrate, and an optical input circuit disposed over the substrate. The optical input circuit includes a first plurality of inputs each configured to transmit a respective optical test signal of a plurality of optical test signals. Each of the plurality of optical test signals includes a respective dominant wavelength of a plurality of dominant wavelengths. The optical input circuit further includes an output coupled to an input waveguide of the optical DUT. The output is configured to transmit a combined optical test signal comprising the plurality of optical test signals.