Patent · US Active

Process for hydrogenating silicon tetrachloride

US11027979B2 · kind B2 · utility

0Cited by

4References

18Claims

0Family size

Assignee

Wacker Chemie AG · DE

Inventors

Martin Zettl · Burghausen, DE
Andreas Hirschmann · Ering, DE
Uwe Pätzold · Burghausen, DE
Robert Ring · Haiming, DE

Key dates

Filing date	Nov 23, 2016
Grant date	Jun 8, 2021
Priority date	—
Expiry date	Dec 22, 2036

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC01B33/1071
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

The invention relates to a process for hydrogenating silicon tetrachloride in a reactor, wherein a reactant gas containing hydrogen and silicon tetrachloride is heated to a temperature between 850° C. and 1600° C. by means of at least one heating element, which comprises a graphite surface, wherein the temperature of the heating element is between 850° C. and 1600° C. The process is characterized in that a nitrogen compound is added to the reactant gas in a substance amount fraction of 0.1 to 10% based on hydrogen.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.