Patent · US Active

Low wavefront error piezoelectrically actuated optical element

US11029511B2 · kind B2 · utility

0Cited by
0References
20Claims
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Assignee

Inventors

Key dates

Filing dateFeb 27, 2018
Grant dateJun 8, 2021
Priority date
Expiry dateJun 28, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B3/14
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

There is presented an optical element (100, 500, 600, 700) comprising a support structure (101, 501) with a sidewall (112, 512), a bendable cover member (102, 502, 702) attached to the sidewall (112, 512), one or more piezoelectric actuators (103, 104, 105) arranged for shaping said bendable cover member (102, 502, 702) into a desired shape, wherein said optical element (100, 500, 600, 700) comprises an optically active area (111, 511) with an optical axis (110, 510), wherein an outer edge (215A-E) of the one or more piezoelectric actuators (103, 104, 105) as observed in a direction being parallel with the optical axis (110, 510) defines a first line, and an inner edge (109) of the support structure (101, 501) at the interface between the support structure (101, 501) and the bendable cover member (102, 502, 702) as observed in the direction being parallel with the optical axis (110, 510) defines a second line, wherein the first line and the second line as observed in the direction being parallel with the optical axis (110, 510) cross each other in two or more positions and/or are parallel and coincident in one or more positions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.