High power amplifier circuit with protective feedback circuit

US11038479B2 · kind B2 · utility

Assignee

• COMET AG · DE

Inventors

• Anton Labanc · Ehrenkirchen, DE
• Daniel Gruner · Müllheim, DE

Key dates

• Filing date: Feb 19, 2018
• Grant date: Jun 15, 2021
• Expiry date: Apr 28, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H2242/26
• WIPO field: Basic communication processes
• WIPO sector: Electrical engineering

Abstract

Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.