Low noise ultrathin freestanding membranes composed of atomically-thin 2D materials
US11041247B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2020 |
| Grant date | Jun 22, 2021 |
| Priority date | — |
| Expiry date | Feb 4, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/48721
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides methods for direct growth of low noise, atomically thin freestanding membranes of two-dimensional monocrystalline or polycrystalline materials, such as transition metal chalcogenides including molybdenum disulfide. The freestanding membranes are directly grown over an aperture by reacting two precursors in a chemical vapor deposition process carried out at atmospheric pressure. Membrane growth is preferentially over apertures in a thin sheet of solid state material. The resulting membranes are one or a few atomic layers thick and essentially free of defects. The membranes are useful for sequencing of biopolymers through nanopores.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.