Inspection apparatus for optically inspecting an object, and object inspection system
US11041813B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2018 |
| Grant date | Jun 22, 2021 |
| Priority date | — |
| Expiry date | Feb 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8829
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The quality of objects and workpieces of a manufacturing process is often evaluated based on surface and/or form. An inspection apparatus for optically, in particular deflectometrically, inspecting an object includes a hollow body housing having an opening, the object being positionable in the opening for the inspection; a camera having a plane of focus and a camera direction extending toward the opening of the housing, and being configured to take a plurality of object images of the object situated in the plane of focus; a plurality of light sources arranged around the opening and designed for variably illuminating the plane of focus; and an evaluation unit configured to determine a topography of the object based on the object images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.