Hinge for micro and nanoelectromechanical systems with out-of-plane displacement and reduced non-linearity

US11041992B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Samer DAGHER · Grenoble, FR
• Loic Joet · Grenoble, FR

Key dates

• Filing date: Dec 19, 2019
• Grant date: Jun 22, 2021
• Expiry date: Dec 19, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R19/005
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A hinge between a first part and a second part of a microelectromechanical system including a first element and a second element free to move relative to each other in an out-of-plane direction is disclosed. The hinge includes a first rigid part; a second part fixed to a first face of the first part by one end and anchored to the second element by a second end, the second part deforming in bending in the out-of-plane direction; and a third part fired to a first face of the first part by a second end, and anchored to the first element by a second end, the third part deforming in bending in the out-of-plane direction. In an undeformed state, the second part and the third part each includes one face located in the same plane orthogonal to the out-of-plane direction.