Point-spread-function measurement device and measurement method, image acquisition apparatus, and image acquisition method
US11042017B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 9, 2018 |
| Grant date | Jun 22, 2021 |
| Priority date | — |
| Expiry date | Jul 31, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/285
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A point-spread-function measurement device includes: a scanner that scans two illumination light beams emitted from a light source; an illumination optical system that radiates the two illumination light beams scanned by the scanner onto a sample; a relative-position adjustor that changes a relative irradiation position, in the sample, between the two illumination light beams radiated by the illumination optical system; a detection optical system that detects signal light generated at an overlapping position, in the sample, of the illumination light beams radiated by the illumination optical system; and a calculator that calculates a point spread function based on the signal light detected by the detection optical system and the relative irradiation position between the two illumination light beams when the signal light is detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.