System and method for scheduling semiconductor lot to fabrication tool
US11042148B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2018 |
| Grant date | Jun 22, 2021 |
| Priority date | — |
| Expiry date | Feb 8, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In the disclosure, a scheduled route of a lot may be rescheduled to another fabrication tool performing the same fabrication processes as to expand the production line and throughput. The controlling method includes at least the following steps. The lot is scheduled with a predetermined route having a plurality of fabrication tools configured to process the lot with a plurality of fabrication processes in a sequence. The lot is monitored as the lot is being processed by the fabrication tools in each of the fabrication processes, and inspection data is generated for each fabrication process. The lot is rescheduled to another fabrication tool outside of the predetermined route for one of the fabrication processes according to a release rule and the inspection data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.