ESD protection composite structure, ESD protection device, and manufacturing method thereof
US11044798B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2018 |
| Grant date | Jun 22, 2021 |
| Priority date | — |
| Expiry date | Jul 21, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05F3/04
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ESD protection composite structure includes a link layer, a progressive layer, and a composite layer. The link layer is used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer includes a metal material. The progressive layer is disposed on the link layer, wherein the material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. The composite layer is disposed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 Ω/sq to 1×108 Ω/sq.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.