Phased array steering for laser beam positioning systems
US11045899B2 · kind B2 · utility
0Cited by
6References
13Claims
0Family size
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Key dates
| Filing date | Aug 30, 2017 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Apr 24, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49165
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.