Mirror unit, and method for manufacturing the mirror unit
US11048076B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2019 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Jan 2, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/102
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mirror unit includes a mirror device, a light incident/emission portion, and a support portion. The mirror device includes a base, a movable mirror, and a drive unit. The light incident/emission portion includes a first joining portion joined to a region that is located between a first electrode pad and a second electrode pad, and at least one of the movable mirror and the drive unit in a first surface of the base, and a first main body portion. The support portion includes a second joining portion joined to a region that overlaps each of the first electrode pad and the second electrode pad when viewed from a first direction in a second surface of the base, and a second main body portion. The first main body portion is provided with a first light passage region that overlaps a mirror surface of the movable mirror when viewed from the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.