Method for restoring an illumination system for an EUV apparatus, and detector module
US11048173B2 · kind B2 · utility
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3References
20Claims
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Key dates
| Filing date | Apr 15, 2020 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Apr 15, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70975
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for restoring an illumination system installed in an EUV apparatus is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.