Detecting a substrate
US11054346B2 · kind B2 · utility
0Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2018 |
| Grant date | Jul 6, 2021 |
| Priority date | — |
| Expiry date | Jun 23, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1028
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This disclosure is directed to a system and method for detecting a surface of a substrate within a scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.