PN-junction phase modulator in a large silicon waveguide platform

US11054674B2 · kind B2 · utility

Assignee

• Rockley Photonics Limited · GB

Inventors

• Dong Yoon Oh · Alhambra, US
• David Arlo Nelson · Fort Collins, US
• Pradeep Srinivasan · Fremont, US
• Amit Singh Nagra · Altadena, US
• Aaron John Zilkie · Pasadena, US
• Jeffrey Driscoll · San Jose, US
• Aaron L. Birkbeck · San Diego, US

Key dates

• Filing date: Apr 24, 2019
• Grant date: Jul 6, 2021
• Expiry date: Apr 24, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F2203/50
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A modulator. In some embodiments, the modulator includes a portion of an optical waveguide, the waveguide including a rib extending upwards from a surrounding slab. The rib may have a first sidewall, and a second sidewall parallel to the first sidewall. The rib may include a first region of a first conductivity type, and a second region of a second conductivity type different from the first conductivity type. The second region may have a first portion parallel to and extending to the first sidewall, and a second portion parallel to the second sidewall. The first region may extend between the first portion of the second region and the second portion of the second region.