Optical modulator and method for manufacturing the same
US11054675B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 24, 2018 |
| Grant date | Jul 6, 2021 |
| Priority date | — |
| Expiry date | Aug 24, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/50
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is an optical modulator which is small in optical loss, is small in a size, and is low in required voltage and is operable to perform high-speed operation. The optical phase modulator 100 comprises a rib-type waveguide structure 110 including: a PN junction 106 which is formed of Si and is formed in a lateral direction on a substrate; and an Si1-xGex layer 108 which is constituted of at least one layer and is doped with an impurity to a p-type and is superposed on the PN junction 106 so as to be electrically connected to the PN junction 106. The rib-type waveguide structure 110 has a substantially uniform structure along a light propagation direction, and in a direction parallel with the substrate and perpendicular to the light propagation direction, a position of a junction interface 106a of the PN junction 106 is offset from a center of the Si1-xGex layer 108.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.