Microelectromechanical system and control method to control a piezoelectric drive based on an admittance or impedance of the piezoelectric drive
US11056985B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Oct 19, 2016 |
| Grant date | Jul 6, 2021 |
| Priority date | — |
| Expiry date | Jun 14, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical system includes a piezoelectric drive and a control unit coupled to the piezoelectric drive and designed to control the piezoelectric drive based on a change of the admittance and/or the impedance of the piezoelectric drive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.