Adjustable hyperspectral detection chip enhanced by multi-resonance plasmonic mechanism

US11060916B2 · kind B2 · utility

Assignee

• SOUTHEAST UNIVERSITY · CN

Inventors

• Tong Zhang · Palo Alto, US
• Dan Su · Nanhu, CN
• Meng Xiong · 安丰镇, CN
• Feng Shan · 安丰镇, CN
• Xiaoyang Zhang · 刘岗镇, CN

Key dates

• Filing date: May 28, 2018
• Grant date: Jul 13, 2021
• Expiry date: May 28, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2003/2826
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An adjustable hyperspectral detection chip enhanced by a multi-resonance plasmonic mechanism. The detection chip consists of an array of metal nanonail resonator detection units. Each detection unit (1) comprises: a bottom electrode (2), a semiconductor material layer (3), a spacer layer (4), a nanonail array (5), a control material layer (6), a top electrode (7), a peripheral control signal (8), and a driving circuit (9). The positional relationship from top to bottom is the top electrode (7), the control material layer (6), the nanonail array (5), the spacer layer (4), the semiconductor material layer (3), and the bottom electrode (2). The nanonail array (5) is loaded inside the control material layer (6), and the peripheral control signal (8) and the driving circuit (9) are connected to both sides of the control material layer (6).