Coil actuated pressure sensor and deflectable substrate
US11061084B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2019 |
| Grant date | Jul 13, 2021 |
| Priority date | — |
| Expiry date | Nov 12, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a conductive substrate having a cavity which forms a thin portion that can be deformed by a pressure differential. A magnetic field sensor has at least one coil responsive to a changing coil drive signal and positioned proximate to the thin portion of the substrate that induces eddy currents in the thin portion that generate a reflected magnetic field. Magnetic field sensing elements detect the reflected magnetic field and generate a magnetic field signal. The magnetic field sensor is positioned so that deformation of the thin portion of the substrate causes a distance between the thin portion of the substrate and the magnetic field sensor to change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.