Process optimization using design of experiments and response surface models
US11062928B2 · kind B2 · utility
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5References
17Claims
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Key dates
| Filing date | Oct 7, 2019 |
| Grant date | Jul 13, 2021 |
| Priority date | — |
| Expiry date | Oct 7, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Using measurements from a metrology tool, combinations of tool settings on the metrology tool can be determined. Candidates can then be determined and a response surface model can be generated for each of the candidates. A list of the candidates of the tool settings that provide a maximum response and that are least sensitive to sources of noise can then be determined from the response surface models. The list of the candidates can each be from a denser region of the response surface model.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.