Patent · US Active

Germanium based focal plane array for the short infrared spectral regime

US11063079B2 · kind B2 · utility

1Cited by
4References
28Claims
0Family size

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Key dates

Filing dateJan 2, 2019
Grant dateJul 13, 2021
Priority date
Expiry dateJan 2, 2039

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/50

Abstract

Light detecting structures comprising a Si base having a pyramidal shape with a wide incoming light-facing pyramid bottom and a narrower pyramid top and a Ge photodiode formed on the Si pyramid top, wherein the Ge photodiode is operable to detect light in the short wavelength infrared range, and methods for forming such structures. A light detecting structure as above may be repeated spatially and fabricated in the form of a focal plane array of Ge photodetectors on silicon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.