Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

US11066295B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Philip Kaupmann · Gundelfingen, DE
• Stefan Pinter · Reutlingen, DE
• Helmut Grutzeck · Tübingen, DE
• Jochen Franz · Reutlingen, DE
• Joerg Muchow · Reutlingen, DE

Key dates

• Filing date: Nov 16, 2017
• Grant date: Jul 20, 2021
• Expiry date: Jun 2, 2038

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/058
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical component having a mount, an adjustable element, which is connected via at least one spring to the mount, and an actuator device, a first oscillatory motion of the adjustable element about a first axis of rotation and simultaneously a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, being excitable about a second axis of rotation in response to the actuator device; and the adjustable element being configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is adjustable by a resulting angular momentum about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to second axis of rotation. Also, a method for manufacturing a micromechanical component. Moreover, a method for exciting a motion of an adjustable element about a rotational axis.