Tungsten pentachloride conditioning and crystalline phase manipulation
US11066310B2 · kind B2 · utility
1Cited by
6References
4Claims
0Family size
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Key dates
| Filing date | Jun 10, 2020 |
| Grant date | Jul 20, 2021 |
| Priority date | — |
| Expiry date | Jun 10, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2002/72
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Conditioning of tungsten pentachloride to form specific crystalline phases is disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.