Optical module
US11067380B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2018 |
| Grant date | Jul 20, 2021 |
| Priority date | — |
| Expiry date | Jul 6, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/104
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.