Charged particle beam apparatus
US11069513B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2020 |
| Grant date | Jul 20, 2021 |
| Priority date | — |
| Expiry date | Feb 19, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam apparatus has a chamber configured to accommodate a sample with. An inside of the chamber is decompressed. A tube having an opening is disposed in the chamber, and introduces a mixed gas having a plurality of types of gases, in a direction towards the sample. A first beam generator emits a charged particle beam toward at least one of a region between an opening of the tube and the sample, or a region of the sample against which the mixed gas collides. A mixed gas generator provides the mixed gas to the tube. The opening of the tube has an elongated shape in a cross section in a direction substantially perpendicular to a flow direction of the mixed gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.