Preparation apparatus for silicon carbide crystals comprising a circular cylinder, a doping tablet, and a plate
US11072871B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Dec 20, 2019 |
| Grant date | Jul 27, 2021 |
| Priority date | — |
| Expiry date | Dec 20, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B35/002
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A preparation apparatus for uniform silicon carbide crystals comprises a circular cylinder, a doping tablet, and a plate to stabilize and control the supply of dopants. The accessory does not participate in the reaction in the growth chamber but maintains its efficacy during growth. Finally, a single semi-insulating silicon carbide crystal with uniform electrical characteristics can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.