Subwavelength waveguide opto-mechanical resonator

US11073412B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Boris Taurel · Montbonnot-Saint-Martin, FR
• Laurent Duraffourg · Voiron, FR
• Pierre Labeye · Grenoble, FR

Key dates

• Filing date: Oct 25, 2019
• Grant date: Jul 27, 2021
• Expiry date: Oct 25, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12138
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An opto-mechanical resonator including a waveguide formed by a plurality of first strips spaced apart from one another; and two mirrors disposed facing one another, which mirrors are optically reflective over at least part of a guide wavelength range of the waveguide. The waveguide extends between the two mirrors, and forms therewith an optically resonant cavity. At least part of the waveguide is held such that it is suspended over a substrate by at least one deformable mechanical element.